FILTRATION
Medium to High Vacuum Filtration
WL Series ISO Flanges K100 - K320
Overview
Solberg’s WL Series Vacuum Filters are designed for a variety of industrial and semicon processes where rapid thermal and/or pressure cycles create harsh operating conditions. Ideal for medium-high vacuum applications that utilize vacuum furnaces or deposition tools, the WL series comes standard with a variety of vacuum rated flange options and replaceable filter elements that offer superior protection and longevity for the vacuum system.
Housings in this series are 100% helium leak tested to ensure vacuum integrity and verify leak rates down to 1x10-5 mbar L/s.
Features 
- ISO-K stainless steel flanges standard
- K200 housings and larger have domed lid with hinge to minimize deflection
- NW10 differential ports for accurate vacuum ΔP readings
- Corrosive resistant black powder coat carbon steel
- Painted o-ring groove, free of scratches
- Lifting lugs and leg brackets standard
Technical Specifications
- Rated vacuum leak rate of 1x10-5 mbar L/sec or better (verified by helium leak test)
- Temp (continuous): min -26°C (-15°F) max 104°C (220°F)
- Filter change out differential: 37-50 mbar over initial ΔP
- Polyester: 99%+ removal efficiency standard to 5 micron
- Paper: 99%+ removal efficiency standard to 2 micronn
Options
- Filter media options available to meet strict process requirements: PTFE, PTFE Glass, SS mesh, and more
- Activated alumina, activated carbon, and zeolite available for foreline trapping and other applications
- Stainless steel (select models)
Other Flange Types Available: 
| ISO Flg Inlet / Outlet | Assembly m³/hr Rating | Assembly Part Number | Dimensions (mm) | Suggested Service Height (mm) | ||||
|---|---|---|---|---|---|---|---|---|
| Polyester | Pape | A | B | C | D | |||
| K100 | 885 | WL-235P-K100 | WL-234P-K100 | 645 | 229 | 305 | 470 | 254 |
| K100 | 885 | WL-335P-K100 | WL-334P-K100 | 645 | 229 | 306 | 470 | 381 |
| K160 | 1870 | WL-275P-K160 | WL-274P-K160 | 699 | 305 | 406 | 521 | 254 |
| K160 | 1870 | WL-375P-K160 | WL-374P-K160 | 609 | 305 | 406 | 521 | 381 |
| K200 | 3060 | WL-377P-K200 | WL-376P-K200 | 924 | 356 | 506 | 648 | 762 |
| K250 | 4930 | WL-385P-K250 | WL-384P-K250 | 1114 | 432 | 610 | 889 | 762 |
| K320 | 7935 | WL-485P-K320 | WL-484P-K320 | 1118 | 406 | 610 | 864 | 762 |
| K320 | 8415 | WL-685P-K320 | WL-384P(2)-K320 | 1422 | 432 | 616 | 1143 | 838 |